Share Email Print
cover

Proceedings Paper

The Saddle Field Source In Optical Thin Film Processing
Author(s): D Roger Evans
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The saddle field source has for many years played a unique role in the preparation of specimens for electron microscopy and in mass spectrometry analysis. It is the purpose of this work to show where the advantages of this unique source are now being successfully exploited in the field of thin film deposition.

Paper Details

Date Published: 24 September 1986
PDF: 2 pages
Proc. SPIE 0653, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion V, (24 September 1986); doi: 10.1117/12.938341
Show Author Affiliations
D Roger Evans, Ion Tech Ltd. (England)


Published in SPIE Proceedings Vol. 0653:
Optical Materials Technology for Energy Efficiency and Solar Energy Conversion V
Claes-Goeran Granqvist; Carl M. Lampert; John J. Mason; Volker Wittwer, Editor(s)

© SPIE. Terms of Use
Back to Top