Share Email Print
cover

Proceedings Paper

Evaluation And Control Of The Properties Of Thin Sputtered Silver Films For Spectrally Selective Coatings.
Author(s): J Szczyrbowski; A Dietrich; K Hartig
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The influence of the deposition parameters on the electrical and optical properties of very thin silver films prepared by magnetron sputtering was studied. To evaluate the film properties a method was used, which is based on simple optical transmission measurements, and was proposed recently by one of the authors /1/. The results show that the specific resistivity, the plasma energy and the optical resistivity of films below 30 nm thickness are very sensitive to deposition parameters as cathode power density. It is concluded that the obtained variations in the optical and electrical properties are related to the density of the sputtered films.

Paper Details

Date Published: 24 September 1986
PDF: 6 pages
Proc. SPIE 0653, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion V, (24 September 1986); doi: 10.1117/12.938322
Show Author Affiliations
J Szczyrbowski, Leybold-Heraeus GmbH (Germany)
A Dietrich, Leybold-Heraeus GmbH (Germany)
K Hartig, Leybold-Heraeus GmbH (Germany)


Published in SPIE Proceedings Vol. 0653:
Optical Materials Technology for Energy Efficiency and Solar Energy Conversion V
Claes-Goeran Granqvist; Carl M. Lampert; John J. Mason; Volker Wittwer, Editor(s)

© SPIE. Terms of Use
Back to Top