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Proceedings Paper

An Automatic Interference Pattern Processor With Interactive Capability
Author(s): Walter H. Augustyn; Alvin H. Rosenfeld; Carl A. Zanoni
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Paper Abstract

An automatic interference pattern processor has been developed for the purpose of rapidly and accurately evaluating either real time interference patterns or interferograms. The system has been designed to provide quick and easily interpretable feedback so that the operator can monitor the system's measurements. The system includes: (1) a semiautomatic mode to facilitate the measurement of difficult interference patterns and (2) an integral, easily used calibration mode. The results of the least squares evaluation are available in a variety of formats.

Paper Details

Date Published: 15 December 1978
PDF: 10 pages
Proc. SPIE 0153, Advances in Optical Metrology I, (15 December 1978); doi: 10.1117/12.938230
Show Author Affiliations
Walter H. Augustyn, Zygo Corporation (United States)
Alvin H. Rosenfeld, Zygo Corporation (United States)
Carl A. Zanoni, Zygo Corporation (United States)

Published in SPIE Proceedings Vol. 0153:
Advances in Optical Metrology I
N. Balasubramanian; James C. Wyant, Editor(s)

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