Share Email Print

Proceedings Paper

Microprocessor-Based Automatic Heterodyne Interferometer
Author(s): F. M. Mottier
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

The interferometer described in this article combines a number of principles known for a long time in a system of unusual versatility. The operation modes range from classical interferometry for visual or photographic evaluation of apertures up to 150 mm diameter, to programmed scan heterodyne interferometry with fringe counting and to time and space resolved subfringe measurement with better than 10 nm resolution.

Paper Details

Date Published: 15 December 1978
PDF: 6 pages
Proc. SPIE 0153, Advances in Optical Metrology I, (15 December 1978); doi: 10.1117/12.938228
Show Author Affiliations
F. M. Mottier, United Technologies Research Center (United States)

Published in SPIE Proceedings Vol. 0153:
Advances in Optical Metrology I
N. Balasubramanian; James C. Wyant, Editor(s)

© SPIE. Terms of Use
Back to Top