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Proceedings Paper

Quasi-Real-Time High Precision Interferometric Measurements Of Deforming Surfaces
Author(s): N. A. Massie
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Paper Abstract

Using a heterodyne interferometer of unique design, high precision measurements of optical surfaces while undergoing deformation have been obtained. The device is described and results of various investigations are presented.

Paper Details

Date Published: 15 December 1978
PDF: 7 pages
Proc. SPIE 0153, Advances in Optical Metrology I, (15 December 1978); doi: 10.1117/12.938227
Show Author Affiliations
N. A. Massie, Rockwell International (United States)

Published in SPIE Proceedings Vol. 0153:
Advances in Optical Metrology I
N. Balasubramanian; James C. Wyant, Editor(s)

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