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Proceedings Paper

The Use Of Microdensitometers As A Basis For Highly Accurate Metrology
Author(s): H. J. Caulfield; David L. Kryger
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Paper Abstract

Microdensitometers have already solved the problem of maintaining high spped and high accuracy across large regions of space. Modifications are needed to operate with much higher speed and in the reflection mode. Experimental results confirm accuracies better than 0.1 gm over areas over 40 cm.

Paper Details

Date Published: 15 December 1978
PDF: 4 pages
Proc. SPIE 0153, Advances in Optical Metrology I, (15 December 1978); doi: 10.1117/12.938211
Show Author Affiliations
H. J. Caulfield, Aerodyne Research, Inc. (United States)
David L. Kryger, Aerodyne Research, Inc. (United States)


Published in SPIE Proceedings Vol. 0153:
Advances in Optical Metrology I
N. Balasubramanian; James C. Wyant, Editor(s)

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