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Proceedings Paper

Microfabrication Of Planar Waveguide Devices On LiNbO[sub]3[/sub]
Author(s): W. Doldissen; H. Heidrich; D. Hoffmann
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Paper Abstract

Tolerances in the process technology of planar electrooptical wave guide device on LiNbO3 are described with emphasis on pattern generation for switching modules of higher complexity.

Paper Details

Date Published: 3 November 1986
PDF: 5 pages
Proc. SPIE 0651, Integrated Optical Circuit Engineering III, (3 November 1986); doi: 10.1117/12.938122
Show Author Affiliations
W. Doldissen, Heinrich-Hertz-Institut fur Nachrichtentechnik Berlin GmbH (Germany)
H. Heidrich, Heinrich-Hertz-Institut fur Nachrichtentechnik Berlin GmbH (Germany)
D. Hoffmann, Heinrich-Hertz-Institut fur Nachrichtentechnik Berlin GmbH (Germany)


Published in SPIE Proceedings Vol. 0651:
Integrated Optical Circuit Engineering III
Ralf Th. Kersten, Editor(s)

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