Proceedings PaperConsequences Of Laser Discharge Impedance On Circuit Designs
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Transverse discharge gas lasers exhibit a wide range of requirements in terms of operating voltage, discharge duration, energy deposition, and details of breakdown mechanism. The negative slope of the impedance characteristic, coupled with a large impedance range during a discharge cycle, can yield some unexpected results. Waveforms taken from several different lasers, including HP, XeCl, and KrF are presented, and practical consequences of the dynamic impedances are considered. These include: choices of components in final pulse forming networks; charging system requirements; and calculation of predicted performance, preionization, impedance matching, and circuit losses. mhese lead to a discharge system optimized for the particular application.