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Proceedings Paper

Vibration Control For Ultraprecision Motion Machineries
Author(s): Akira Kanai; Masakazu Miyashita; Junichi Yoshioka; Fukuo Hashimoto
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Paper Abstract

Development of ultraprecision machines requires motion mechanisms with dynamic characteristics being sufficiently resistive to environmental disturbances as well as vibration control devices isolating from them. In the paper active application of frictional forces to the machines are proposed in viewpoint of this point. Further, new strategies for various problems resulting from application of frictional forces are also proposed for linear feed mechanism and the test results are shown. They are load compensation unit, composite bearing guideway and force operation feed mechanism.

Paper Details

Date Published: 26 August 1987
PDF: 7 pages
Proc. SPIE 0732, 1st Intl Conf on Vibration Control in Optics and Metrology, (26 August 1987); doi: 10.1117/12.937918
Show Author Affiliations
Akira Kanai, Tokyo Metropolitan University (Japan)
Masakazu Miyashita, Ashikaga Institute of Technology (Japan)
Junichi Yoshioka, Nissin Ultraprecision Technology Research (Japan)
Fukuo Hashimoto, Tokyo Metropolitan College of Aeronautical Engineering (Japan)

Published in SPIE Proceedings Vol. 0732:
1st Intl Conf on Vibration Control in Optics and Metrology
Lionel R. Baker; Daniel Vukobratovich, Editor(s)

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