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Proceedings Paper

Vibration Control in Sub-nanometre Metrology
Author(s): D. G. Chetwynd
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Paper Abstract

The use of X-ray interferometry makes possible the calibration of microdisplacement transducers to precisions of around 10 pm on a relatively routine basis. Naturally, this is not achieved without careful mechanical design, especially with regard to vibration isolation and thermal stability. A facility has been constructed, and is described here, for the evaluation of this method. Its performance when operating with a single-crystal silicon monolithic interferometer is examined. In many respects the system design follows conventional patterns, for example in using a high mass base supported on active air-springs. However, as the most sensitive parts are required to have controlled motion while in operation, particular attention is paid to the active force-loops. A solenoid-based force transducer is shown to have ideal characteristics for this application.

Paper Details

Date Published: 26 August 1987
PDF: 11 pages
Proc. SPIE 0732, 1st Intl Conf on Vibration Control in Optics and Metrology, (26 August 1987); doi: 10.1117/12.937906
Show Author Affiliations
D. G. Chetwynd, University of Warwick (United Kingdom)


Published in SPIE Proceedings Vol. 0732:
1st Intl Conf on Vibration Control in Optics and Metrology
Lionel R. Baker; Daniel Vukobratovich, Editor(s)

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