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Proceedings Paper

Template-Set Approach to VLSI Pattern Inspection
Author(s): Soo-Ik Chae; James T. Walker; David H. Dameron; Chong-Cheng Fu; James D. Meindl
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Paper Abstract

A new approach is described for the automatic detection of defects in VLSI circuit patterns such as photomasks and wafers. It is based on morphological feature extraction using templates that represent a set of local pixel configurations within a specified window. These templates are stored in content-addressable memories (CAMs) to facilitate parallel comparisons of window-pattern scanning over a tested image. Maskable CAMs reduce the size of a template set substantially. Two error-detection algorithms are implemented to detect both random defects and dimensional errors.

Paper Details

Date Published: 18 May 1987
PDF: 9 pages
Proc. SPIE 0730, Automated Inspection and Measurement, (18 May 1987); doi: 10.1117/12.937868
Show Author Affiliations
Soo-Ik Chae, Stanford University (United States)
James T. Walker, Stanford University (United States)
David H. Dameron, Stanford University (United States)
Chong-Cheng Fu, Stanford University (United States)
James D. Meindl, Stanford University (United States)

Published in SPIE Proceedings Vol. 0730:
Automated Inspection and Measurement
Michael J. W. Chen; Robert H. Thibadeau, Editor(s)

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