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Proceedings Paper

Micromachined Resonant Structures
Author(s): B Culshaw; D Uttam; J Nixon; K Thornton; A Wright
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Paper Abstract

Micromachined structures, usually formed by anistropic etchings in silicon, can be fabricated with high precision at low cost and may form the basis of a variety of low power consumption resonant frequency mircotransducers. Such structures are compatible with direct optical excitation of their mechanical vibra, on and as such form an attractive family of fibre optic sensors. This paper reviews the basic features of these micromachined structures and presents an assessment of their performance potential as fibre optic sensors.

Paper Details

Date Published: 28 April 1987
PDF: 5 pages
Proc. SPIE 0718, Fiber Optic and Laser Sensors IV, (28 April 1987); doi: 10.1117/12.937502
Show Author Affiliations
B Culshaw, University of Strathclyde (United Kingdom)
D Uttam, University of Strathclyde (United Kingdom)
J Nixon, University of Strathclyde (United Kingdom)
K Thornton, University of Strathclyde (United Kingdom)
A Wright, University of Strathclyde (United Kingdom)


Published in SPIE Proceedings Vol. 0718:
Fiber Optic and Laser Sensors IV
Ramon P. DePaula; Eric Udd, Editor(s)

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