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Proceedings Paper

Industrial Applications Of Excimer Lasers
Author(s): Thomas Znotins
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Paper Abstract

Excimer lasers are finding increasing use in both semiconductor and materials processing. In the semiconductor area, this has led to the development of excimer based processes for lithography, film deposition, etching, doping and annealing. In materials processing, the unique capabilities of the excimer laser offers the potential for greatly extending the range of laser based cutting, drilling and marking techniques. This paper is intended to provide an overview of these areas. Attention is given to the means by which the excimer laser addresses the critical needs in each particular case.

Paper Details

Date Published: 11 March 1987
PDF: 8 pages
Proc. SPIE 0710, Excimer Lasers and Optics, (11 March 1987); doi: 10.1117/12.937297
Show Author Affiliations
Thomas Znotins, Lumonics Inc. (Canada)


Published in SPIE Proceedings Vol. 0710:
Excimer Lasers and Optics
Ting-Shan Luk, Editor(s)

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