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Proceedings Paper

High Power Picosecond KRF Laser System
Author(s): Shuntaro Watanabe; Akira Endoh; Masayoshi Watanabe
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Paper Abstract

Picosecond amplification characteristics were investigated in KrF amplifiers with aperture sizes of 2xlcm2 and 7x7cm2. The system including a ps pulse generator, two 2xlcm2-aperture lasers and a 7x7cm2-aperture laser was successfully operated with the precise synchronism, resulting in an output energy of 150 mJ.

Paper Details

Date Published: 11 March 1987
PDF: 6 pages
Proc. SPIE 0710, Excimer Lasers and Optics, (11 March 1987); doi: 10.1117/12.937292
Show Author Affiliations
Shuntaro Watanabe, University of Tokyo (Japan)
Akira Endoh, University of Tokyo (Japan)
Masayoshi Watanabe, University of Tokyo (Japan)


Published in SPIE Proceedings Vol. 0710:
Excimer Lasers and Optics
Ting-Shan Luk, Editor(s)

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