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Proceedings Paper

High Average Power Commercial Excimer Lasers
Author(s): Jack Andrellos; Mary Essary; Herbert Pummer
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Paper Abstract

High power excimer lasers which can deliver average powers of 100 W or more have been commercially available since 1983 when Lambda Physik introduced its model EMG 203 MSC. This progress was the result of a new proprietary switching technique (Magnetic Switch Control or MSC) which allowed unprecedented control of the energy flow through the high voltage discharge circuitry. In conjunction with a carefully designed gas flow and the judicious choice of components, this technique has meanwhile enabled the design of a large variety of reliable excimer systems including injection locked systems, lasers which deliver 120 W average power and lasers which can operate at up to 1000 Hz pulse repetition rate.

Paper Details

Date Published: 11 March 1987
PDF: 3 pages
Proc. SPIE 0710, Excimer Lasers and Optics, (11 March 1987); doi: 10.1117/12.937288
Show Author Affiliations
Jack Andrellos, Lambda Physik (United States)
Mary Essary, Lambda Physik (United States)
Herbert Pummer, Lambda Physik (United States)


Published in SPIE Proceedings Vol. 0710:
Excimer Lasers and Optics
Ting-Shan Luk, Editor(s)

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