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Proceedings Paper

Mask Making Using A Laser Writing System
Author(s): Robert Gauthier; Jacek Chrostowski; Barry Paton; Michael Cada
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Paper Abstract

An inexpensive IBM based laser writing system for making masks suitable for integrated optic applications is presented. The high degree of computer control makes this technique easy to use and relatively fast. The system can write lines, circles, arcs and shaded areas generating non-conventional designs and can be interfaced with various C A D programs.

Paper Details

Date Published: 10 March 1987
PDF: 3 pages
Proc. SPIE 0704, Integrated Optical Circuit Engineering IV, (10 March 1987); doi: 10.1117/12.937202
Show Author Affiliations
Robert Gauthier, Dalhousie University (Canada)
Jacek Chrostowski, National Research Council of Canada (Canada)
Barry Paton, Dalhousie University (Canada)
Michael Cada, Technical University of Nova Scotia (Canada)


Published in SPIE Proceedings Vol. 0704:
Integrated Optical Circuit Engineering IV
Mark A. Mentzer; Sriram Sriram, Editor(s)

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