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Proceedings Paper

Near Cutoff Propagation In Low Loss Optical Waveguides Formed On Si0[sub]2[/sub]/Si Substrate
Author(s): David E. Zelmon; William C. Borland; Howard E. Jackson; Joseph T. Boyd
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Paper Abstract

Mode properties of four-layer planar optical waveguides consisting of a waveguiding layer bounded above by free space and formed on a silicon dioxide isolation cladding layer which in turn is formed on a thick silicon substrate are considered. Perturbation approaches are shown to be accurate except near mode cutoff where a numerical solution of the four-layer equations is required. Numerical calculations of waveguide attenuation due to substrate coupling for thermally-nitrided silicon dioxide waveguides are presented for a variety of layer thicknesses, layer material compositions, and wavelengths. Comparison with experimental data is included.

Paper Details

Date Published: 10 March 1987
PDF: 6 pages
Proc. SPIE 0704, Integrated Optical Circuit Engineering IV, (10 March 1987); doi: 10.1117/12.937155
Show Author Affiliations
David E. Zelmon, University of Cincinnati (United States)
William C. Borland, University of Cincinnati (United States)
Howard E. Jackson, University of Cincinnati (United States)
Joseph T. Boyd, University of Cincinnati (United States)


Published in SPIE Proceedings Vol. 0704:
Integrated Optical Circuit Engineering IV
Mark A. Mentzer; Sriram Sriram, Editor(s)

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