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Proceedings Paper

Review Of He+ Implanted Optical Waveguides In LiNbO3
Author(s): B. L. Weiss
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Paper Abstract

The implantation of He+ into LiNb03 for the modification of the refractive index and the use of this technique for the fabrication of optical waveguides are reviewed in this paper. The effects of the various fabrication process parameters on the properties of the optical waveguides are also discussed.

Paper Details

Date Published: 10 March 1987
PDF: 4 pages
Proc. SPIE 0704, Integrated Optical Circuit Engineering IV, (10 March 1987); doi: 10.1117/12.937150
Show Author Affiliations
B. L. Weiss, University of Surrey (UK)


Published in SPIE Proceedings Vol. 0704:
Integrated Optical Circuit Engineering IV
Mark A. Mentzer; Sriram Sriram, Editor(s)

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