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Proceedings Paper

Monitoring Of Optical Coatings Of Fractional Layer Thicknesses
Author(s): T. Skettrup
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Paper Abstract

Three methods are proposed for monitoring thin film optical coatings of non-quarterwave-length thicknesses during deposition. These are the turning value method, the inflection point method and the second harmonic method. The advantages of these methods are that they are monochromatic and that they do not rely on any absolute measurements of transmittance during monitoring.

Paper Details

Date Published: 10 July 1987
PDF: 6 pages
Proc. SPIE 0701, 1986 European Conf on Optics, Optical Systems and Applications, (10 July 1987); doi: 10.1117/12.937066
Show Author Affiliations
T. Skettrup, Technical University of Denmark (Denmark)


Published in SPIE Proceedings Vol. 0701:
1986 European Conf on Optics, Optical Systems and Applications
Stefano Sottini; Silvana Trigari, Editor(s)

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