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Proceedings Paper

High Resolution Optical Metrology And Edge Detection Using A Pc-Controlled Smart CCD Camera
Author(s): M. T. Gale; P. Seitz
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Paper Abstract

The excellent properties of a PC-controlled smart CCD camera have been combined with a novel digital edge localization algorithm to produce a high-resolution instrument for optical metrology with the capability of determining edge positions to better than 1% of the pixel dimensions.

Paper Details

Date Published: 10 July 1987
PDF: 5 pages
Proc. SPIE 0701, 1986 European Conf on Optics, Optical Systems and Applications, (10 July 1987); doi: 10.1117/12.937063
Show Author Affiliations
M. T. Gale, Laboratories RCA Ltd. (Switzerland)
P. Seitz, Laboratories RCA Ltd. (Switzerland)


Published in SPIE Proceedings Vol. 0701:
1986 European Conf on Optics, Optical Systems and Applications
Stefano Sottini; Silvana Trigari, Editor(s)

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