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Proceedings Paper

Excimer Lasers
Author(s): Robert C. Sze
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Paper Abstract

A history of excimer laser discharge techniques is discussed. Emphasis is placed on techniques required for dependable, long-lived, commercial devices.

Paper Details

Date Published: 10 July 1987
PDF: 8 pages
Proc. SPIE 0701, 1986 European Conf on Optics, Optical Systems and Applications, (10 July 1987); doi: 10.1117/12.937034
Show Author Affiliations
Robert C. Sze, Los Alamos National Laboratory (United States)


Published in SPIE Proceedings Vol. 0701:
1986 European Conf on Optics, Optical Systems and Applications
Stefano Sottini; Silvana Trigari, Editor(s)

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