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Proceedings Paper

High Speed Image Processing Applied to Microscopy, With Special Reference to Quality Assurance
Author(s): John W. Lockton
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Paper Abstract

A pipelined image processor has been developed to improve and analyse grey level images from electron microscopes. It uses high speed video processing techniques in an image flow system, where image data can be circulated at variable rates (DC to 10MHz) through a series of firmware processors in a recursive fashion around a digital framestore. The commercial system is proving invaluable in the quality assurance of photoresist material where such processing is revealing features not before visible with traditional techniques. This approach is of general value where standard EM methods have an adverse effect on the specimen under investigation, resulting in poor signal quality.

Paper Details

Date Published: 9 January 1984
PDF: 6 pages
Proc. SPIE 0435, Architectures and Algorithms for Digital Image Processing, (9 January 1984); doi: 10.1117/12.937009
Show Author Affiliations
John W. Lockton, Micro Consultants Limited (England)


Published in SPIE Proceedings Vol. 0435:
Architectures and Algorithms for Digital Image Processing
Per-Erik Danielsson; Andre J. Oosterlinck, Editor(s)

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