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Proceedings Paper

The Optical Characterization Of Electronic Materials
Author(s): Roy F. Potter
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Paper Abstract

Three different examples for characterizing parallel-sided specimens with optical techniques are given; spectral emittance of an InAs specimen; AIRS (Angle of Incidence Reflectance Spectrometry) analysis of a III-V quaternary; calculations for AIRS measurerments on a silicon-like substrate having a relatively thick layer with a larger refractive index. Complete formulas ,along with appropriate approximations, are given. Starting with Maxwell's Equations, both the characteristic and Fresnel matrices are developed for the abrupt interface and homogeneous cases followed by indicated steps leading to the practical formulas. Also included is a discussion of dispersion and its relationship to the simultaneity of the duality of electro-magnetic radiation.

Paper Details

Date Published: 28 October 1987
PDF: 14 pages
Proc. SPIE 0699, Laser and Opto-Electronic Technology in Industry: State-of-the-Art Review, (28 October 1987); doi: 10.1117/12.936920
Show Author Affiliations
Roy F. Potter, Western Washington University (United States)

Published in SPIE Proceedings Vol. 0699:
Laser and Opto-Electronic Technology in Industry: State-of-the-Art Review
Jingtang Ke; Ryszard J. Pryputniewicz, Editor(s)

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