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Proceedings Paper

Characterization Of Sputtered Magneto-Optic Thin Films
Author(s): Philip R. Frausto; William B. Johnson; Charles E. Wickersham
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Paper Abstract

Thin films of alloys in the Fe-Tb-Co-Gd quaternary have received considerable attention as candidates for optical read-write storage media. Although the magnetic properties of many different compositions of films have been examined, a systematic investigation of film composition has been tedious due the effort involved with fabrication of many different composite or alloy targets. Multi-target magnetron sputtering (MTS) offers a convenient method to easily prepare a wide range of thin film compositions. In this study, thin films in the Fe-Tb-X ternary (X = C or 0) have been prepared using MTS to examine the effects of two common sputtering system impurity elements, carbon and oxygen. The magnetic properties of these films, measured using a vibrating sample magnetometer, are correlated with the microstructural characteristics determined using optical and electron microscopy techniques. In addition, the effect of room temperature aging on the magnetic properties of thin films overcoated with carbon will be described.

Paper Details

Date Published: 14 January 1987
PDF: 9 pages
Proc. SPIE 0695, Optical Mass Data Storage II, (14 January 1987); doi: 10.1117/12.936817
Show Author Affiliations
Philip R. Frausto, The Ohio State university (United States)
William B. Johnson, The Ohio State university (United States)
Charles E. Wickersham, Varian Specialty Metals (United States)


Published in SPIE Proceedings Vol. 0695:
Optical Mass Data Storage II
Robert P. Freese; Albert A. Jamberdino; Maarten R. de Haan, Editor(s)

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