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Proceedings Paper

Simultaneous, Nondestructive Analysis Of Thickness And Composition Of Multilayer Metal Films Using A Fundamental Parameter XRF Approach.
Author(s): R. Linder; G. Kladnik; J. Augenstine
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Paper Abstract

General algorithms have been developed for interpreting X-ray fluorescence (XRF) data from single and multilayer metal films to yield precise values for both thickness and composition. As an example, the relative precision for a replicate analysis of a multilayer Al-Ti-Cu (substrate) sample was measured to be 0.6% (lo) for a 14 micron Al layer and 2.4% (lσ) for a 65OÅR Ti underlayer. Several examples showing the rapid, nondestructive nature of the analysis will be presented.

Paper Details

Date Published: 12 August 1986
PDF: 7 pages
Proc. SPIE 0691, X-Ray Imaging II, (12 August 1986); doi: 10.1117/12.936617
Show Author Affiliations
R. Linder, Surface Science Laboratories, a Division of Kevex, Inc. (United States)
G. Kladnik, Surface Science Laboratories, a Division of Kevex, Inc. (United States)
J. Augenstine, Surface Science Laboratories, a Division of Kevex, Inc. (United States)


Published in SPIE Proceedings Vol. 0691:
X-Ray Imaging II
D. Keith Bowen; Larry V. Knight, Editor(s)

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