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Proceedings Paper

Structural Depth Profiling by Glancing Angle X-ray Diffraction
Author(s): B. R. York; A. B. Austin
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Paper Abstract

Presented here is a technique to structurally depth profile multilayer films using a Seemann-Bohlin triple axis x-ray diffractometer and a 12 kW rotation anode x-ray source. This paper discusses the Seemann-Bohlin geometry and aberrations related to depth profiling and refraction. The technique was successfully applied to multilayer metallic-thin films a few hundred angstroms thick and demonstrated to have an excellent sensitivity to ultra thin-metallic films less than 25 angstroms thick.

Paper Details

Date Published: 12 August 1986
PDF: 11 pages
Proc. SPIE 0690, X-Rays in Materials Analysis: Novel Applications and Recent Developments, (12 August 1986); doi: 10.1117/12.936610
Show Author Affiliations
B. R. York, International Business Machines Corporation (United States)
A. B. Austin, International Business Machines Corporation (United States)


Published in SPIE Proceedings Vol. 0690:
X-Rays in Materials Analysis: Novel Applications and Recent Developments
Thomas W. Rusch, Editor(s)

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