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Proceedings Paper

Problems in Quantitation in X-Ray Photoelectron Spectroscopy (XPS): the Use of Data Reduction Techniques to Obtain Peak Areas
Author(s): B. L. Maschhoff; K. R. Zavadil; K. W. Nebesny; J. W. Fordemwalt; N. R. Armstrong
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Paper Abstract

Problems in lineshape analysis for quantitation of XPS data on metals are reviewed. Comparison is made of deconvolution versus curve fitting approaches. Deconvolution methods successfully applied to AES data, using electron-energy-loss spectra, are not similarly successful with XPS data. An optimum approach is data fitting using previously formulated lineshapes that account for the large intrinsic energy losses which cause significant distortion of metal core level spectra.

Paper Details

Date Published: 12 August 1986
PDF: 12 pages
Proc. SPIE 0690, X-Rays in Materials Analysis: Novel Applications and Recent Developments, (12 August 1986); doi: 10.1117/12.936607
Show Author Affiliations
B. L. Maschhoff, University of Arizona (United States)
K. R. Zavadil, University of Arizona (United States)
K. W. Nebesny, University of Arizona (United States)
J. W. Fordemwalt, University of Arizona (United States)
N. R. Armstrong, University of Arizona (United States)


Published in SPIE Proceedings Vol. 0690:
X-Rays in Materials Analysis: Novel Applications and Recent Developments
Thomas W. Rusch, Editor(s)

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