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Proceedings Paper

X-Ray Photoelectron Spectroscopy (XPS) Applications Using Microfocused X-Rays
Author(s): Robert Chaney; Robert Cormia; Ruth Siordia
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Paper Abstract

A focusing quartz crystal monochromator system. has been developed that provides a bright X-ray spot at 1486.6ev. The X-ray spot size may he varied from one-hundred fifty (150) to one-thousand (1000) microns in four (4) steps. The X-ray system is combined with a high. performance electron lens that collects greater than five (5) percent of the photoemitted electrons and passes them into a hemispherical capacitor energy analyzer. The electrons are detected at the exit plane with a two (2) dimensional position sensitivity detector. Using this system, XPS has been carried out on a wide variety of practical samples. We will provide a brief review of the system, design followed by examples of the solution to unique problems. Samples which have been CLosen for discussion include: Crash Zone on a Winchester Disk An interocular Lens . Single 5 micron Carbon. Fiber Plasma Modified Polymeric Say The unique benefits of a focused. source with high energy resolution will also be discussed.

Paper Details

Date Published: 12 August 1986
PDF: 6 pages
Proc. SPIE 0690, X-Rays in Materials Analysis: Novel Applications and Recent Developments, (12 August 1986); doi: 10.1117/12.936604
Show Author Affiliations
Robert Chaney, Surface Science instruments, A Division of Kevex Corp, Inc. (United States)
Robert Cormia, Surface Science Instruments, A Division of Kevex Corp, inc. (United States)
Ruth Siordia, Surface Science instruments, A Division of Kevex Corp, Inc. (United States)


Published in SPIE Proceedings Vol. 0690:
X-Rays in Materials Analysis: Novel Applications and Recent Developments
Thomas W. Rusch, Editor(s)

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