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Proceedings Paper

Flash Technology for CCD Imaging in the UV
Author(s): James Janesick; Dave Campbell; Tom Elliott; Taher Daud; Priscilla Ottley
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Paper Abstract

The introduction of the flash gate has made possible the fabrication of backside-illuminated CCDs with high sensitiv4y and stability throughout a wide range of ultraviolet and visible wavelengths (100-5000 Å). It has been determined that the characteristics of the oxide layer beneath the gate are critical to the ultimate performance that can be achieved. By creating an improved oxide layer in conjunction with the flash gate, we are now able to consistently produce CCDs with near-ideal UV performance. In the interest of transferring flash technology to industry, we present in this paper recent results and related background theory that optimize the flash gate specifically for application in the UV.

Paper Details

Date Published: 10 December 1986
PDF: 22 pages
Proc. SPIE 0687, Ultraviolet Technology, (10 December 1986); doi: 10.1117/12.936542
Show Author Affiliations
James Janesick, Jet Propulsion Laboratory (United States)
Dave Campbell, Jet Propulsion Laboratory (United States)
Tom Elliott, Jet Propulsion Laboratory (United States)
Taher Daud, Jet Propulsion Laboratory (United States)
Priscilla Ottley, Jet Propulsion Laboratory (United States)


Published in SPIE Proceedings Vol. 0687:
Ultraviolet Technology
Robert E. Huffman, Editor(s)

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