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Proceedings Paper

Measurement of groove density variation of varied-line-space grating for high-resolution soft x-ray monochromator
Author(s): Y. Senba; H. Kishimoto; T. Miura; H. Ohashi; S. Goto; T. Ishikawa
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Paper Abstract

A varied-line-space grating is used in modern soft X-ray monochromators with a high resolving power. The grating parameters require high accuracy because errors of the parameters lead to the degradation of the resolving power. The parameter tolerances required to maintain a high resolving power were estimated by analytical calculation. The groove density variations of three gratings were measured with a long trace profiler. The measured errors in the parameters were found to be sufficiently small.

Paper Details

Date Published: 15 October 2012
PDF: 6 pages
Proc. SPIE 8501, Advances in Metrology for X-Ray and EUV Optics IV, 850104 (15 October 2012); doi: 10.1117/12.936518
Show Author Affiliations
Y. Senba, Japan Synchrotron Radiation Research Institute (Japan)
H. Kishimoto, Japan Synchrotron Radiation Research Institute (Japan)
T. Miura, Japan Synchrotron Radiation Research Institute (Japan)
H. Ohashi, Japan Synchrotron Radiation Research Institute (Japan)
S. Goto, Japan Synchrotron Radiation Research Institute (Japan)
T. Ishikawa, RIKEN (Japan)


Published in SPIE Proceedings Vol. 8501:
Advances in Metrology for X-Ray and EUV Optics IV
Lahsen Assoufid; Peter Z. Takacs; Anand Krishna Asundi, Editor(s)

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