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Proceedings Paper

Vapor Deposition Synthesis Of Diamond Films
Author(s): Andrzej Badzian; Barbara Simonton; Teresa Badzian; Russell Messier; Karl E. Spear; Rustum Roy
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Paper Abstract

Experiments were conducted on the deposition of diamond films from hydrogen and methane mixtures on silicon substrates by a microwave plasma enhanced chemical vapor deposition technique. Thin films of diamond were obtained. The crystallinity of the films, as determined by electron diffraction, can be controlled and changed from polycrystalline to amorphous. The chemical vapor deposition method of growing diamonds is discussed in a historical perspective in relationship to the optical properties of natural diamonds and to CVD diamond films.

Paper Details

Date Published: 19 December 1986
PDF: 12 pages
Proc. SPIE 0683, Infrared and Optical Transmitting Materials, (19 December 1986); doi: 10.1117/12.936428
Show Author Affiliations
Andrzej Badzian, The Pennsylvania State University (United States)
Barbara Simonton, The Pennsylvania State University (United States)
Teresa Badzian, The Pennsylvania State University (United States)
Russell Messier, The Pennsylvania State University (United States)
Karl E. Spear, The Pennsylvania State University (United States)
Rustum Roy, The Pennsylvania State University (United States)


Published in SPIE Proceedings Vol. 0683:
Infrared and Optical Transmitting Materials
Robert W. Schwartz, Editor(s)

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