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Proceedings Paper

High Precision Angle Measurements Off Small Surfaces
Author(s): Russell A. Chipman
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Paper Abstract

A method is described for measuring the orientation of small plane surfaces several tens of micrometers on a side with a resolution of several seconds of arc. A laser beam waist is located on the test surface which underfills the surface. The reflected beam is detected by a quadrant detector to determine the offset of the beam from its nominal position. This displacement determines the relative angular difference from a predetermined angular standard. Advantages of this method for precise angle determination are the ability to measure small surfaces, insensitivity to translations of the test piece, large test piece clearance for inaccessible surfaces, and compensation for laser drift.

Paper Details

Date Published: 15 November 1983
PDF: 5 pages
Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); doi: 10.1117/12.936353
Show Author Affiliations
Russell A. Chipman, University of Arizona (United States)


Published in SPIE Proceedings Vol. 0429:
Precision Surface Metrology
James C. Wyant, Editor(s)

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