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Proceedings Paper

Direct Comparison Of Mechanical And Optical Measurements Of The Finish Of Precision-Machined Surfaces
Author(s): E. L. Church
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Paper Abstract

Methods for analyzing surface profile data in terms of the finish power spectral density and mean-square finish error are discussed. Results of a preliminary comparison between mechanical- and optical-stylus measurements of a set of precision-machined surfaces are presented. Excellent quantitative agreement is obtained, although certain features observed in the case of strongly periodic surfaces require further study.

Paper Details

Date Published: 15 November 1983
PDF: 9 pages
Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); doi: 10.1117/12.936346
Show Author Affiliations
E. L. Church, USA AMCCOM (United States)


Published in SPIE Proceedings Vol. 0429:
Precision Surface Metrology
James C. Wyant, Editor(s)

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