Proceedings PaperThe Precision Measurement And Characterization Of Surface Finish
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This paper presents a rationale for the precision measurement and characterization of surface finish using Fourier techniques. It offers a precise definition of figure and finish errors in the frequency domain and discusses particular finish statistics of importance for optical surfaces: the finish power spectral density and the mean-square finish error. Problems involved in estimating these quantities from practical measurements are discussed and illustrated. The need for an expanded data base of spectral shapes is emphasized.