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Proceedings Paper

Instantaneous Phase Measuring Interferometry
Author(s): R. Smythe; R. Moore
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Paper Abstract

Conventional phase measuring interferometry normally requires one-half to sixty seconds acquisition time, limiting measurement to stationary phenomenon such as optical element wavefronts. We have developed an instantaneous PMI that measures displacements at one point to a resolution of 0.003 microns. We will describe this instrument and an interferometer measuring phase to lambda/2000 with a measurement aperture of less than one microsec. Also described is an attached system for analysing and displaying wavefronts at up to 10 Hz.

Paper Details

Date Published: 15 November 1983
PDF: 6 pages
Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); doi: 10.1117/12.936335
Show Author Affiliations
R. Smythe, GCA Corp. (United States)
R. Moore, GCA Corp. (United States)


Published in SPIE Proceedings Vol. 0429:
Precision Surface Metrology
James C. Wyant, Editor(s)

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