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Proceedings Paper

Interferometric Phase Measurement Using Spatial Synchronous Detection
Author(s): Kenneth H. Womack
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Paper Abstract

A family of three phase measurement techniques are described that are spatial analogs of the popular temporal phase-shift methods. For these spatial techniques, the need for an active element such as a piezoelectric translator or an electro-optic crystal is eliminated simply by adding tilt to the fringe pattern. Measurements are obtained over a uniform grid with an accuracy comparable to temporal phase-shift interferometry. Advantages and disadvantages are discussed.

Paper Details

Date Published: 15 November 1983
PDF: 8 pages
Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); doi: 10.1117/12.936334
Show Author Affiliations
Kenneth H. Womack, Eastman Kodak Company (United States)


Published in SPIE Proceedings Vol. 0429:
Precision Surface Metrology
James C. Wyant, Editor(s)

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