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Proceedings Paper

Pseudo-Shear Interferometry
Author(s): Peter B. Keenan
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Paper Abstract

Pseudo-Shear Interferometry (PSI) is a technique for obtaining enhanced, absolute accuracy in interferometric measurements. Whereas conventional interferometry yields measurements limited in accuracy by the optical system and by the reference surface, Pseudo-Shear Interferometry provides the capability for measurement accuracy which substantially surpasses it. The technique consists of a regimen for data taking and a mathematical procedure for analyzing the resulting data.

Paper Details

Date Published: 15 November 1983
PDF: 6 pages
Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); doi: 10.1117/12.936333
Show Author Affiliations
Peter B. Keenan, Spectra-Physics, Inc. (United States)


Published in SPIE Proceedings Vol. 0429:
Precision Surface Metrology
James C. Wyant, Editor(s)

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