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Proceedings Paper

Optical Microanalysis In Microelectronic Device And Packaging Manufacture
Author(s): K. M. Popek; J. N . Ramsey
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Paper Abstract

Electron probe microanalysis (and scanning electron microscopy with energy dispersive x-ray analysis) has been used for small area analysis for many years, but it gives only elemental information, in general. Cathodoluminescence and photoluminescence have been available as small area analytical techniques for several years, giving molecular information. Two "new" small area molecular analysis techniques have become available in the last few years, viz Raman (to be discussed in this symposium by C.L. Needham) and infra-red, which we will discuss. Examples will be given of the application of these various optical microanalytical techniques to device and packaging manufacture. The electron probe microanalyzer has been used for many years for analysis of small areas of microelectronic devices and packaging (e.g. Prof. Dave Wittry's initial analysis of Purple Plague was 1959). This type of analysis has been extended widely with the developments of scanning electron microscopes and energy dispersive x-ray analysis detectors and circuitry. Such analysis is elemental, in general, and has been very useful in the study of microstructure, thin films, contamination, corrosion products, etc. in all stages of device development, manufacture, test and application. However, often even quantitative elemental information lacks definition, and molecular information (how the elements are bonded together) is required. (In the analysis method described, some limited molecular information is available in low atomic number elements by measuring x-ray line shifts.)

Paper Details

Date Published: 4 November 1983
PDF: 7 pages
Proc. SPIE 0411, Electro-Optical Instrumentation for Industrial Applications, (4 November 1983); doi: 10.1117/12.935774
Show Author Affiliations
K. M. Popek, International Business Machines Corporation (United States)
J. N . Ramsey, International Business Machines Corporation (United States)

Published in SPIE Proceedings Vol. 0411:
Electro-Optical Instrumentation for Industrial Applications
Robert A. Carella; Frederic M. Zweibaum, Editor(s)

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