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Proceedings Paper

Applications Of The Raman Microprobe In Semiconductor Device Manufacturing
Author(s): Charles D. Needham
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Paper Abstract

The Raman microprobe "MOLE" (Instruments SA, Metuchen, NJ) allows one to obtain a Raman spectrum from a particle as small as one micron in diameter. The technique depends on the spectral analysis of light scattered from a monochromatically (laser) illuminated sample under a microscope; no vacuum is required, and in-situ analysis is usually possible, with minimal sample preparation. The Raman spectrum obtained from the sample, which may be organic or inorganic, gives molecular information which is useful for identification or quantitative analysis. A brief description of the method will be given, with advantages and disadvantages. Applications to various problems of semiconductor device manufacturing including contamination control, corrosion, silicon morphology, and packaging, will also be presented.

Paper Details

Date Published: 4 November 1983
PDF: 5 pages
Proc. SPIE 0411, Electro-Optical Instrumentation for Industrial Applications, (4 November 1983); doi: 10.1117/12.935772
Show Author Affiliations
Charles D. Needham, IBM Corp. (United States)

Published in SPIE Proceedings Vol. 0411:
Electro-Optical Instrumentation for Industrial Applications
Robert A. Carella; Frederic M. Zweibaum, Editor(s)

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