Share Email Print

Proceedings Paper

Selective Transmission Of Thin TiN-Films
Author(s): E. Valkonen; T. Karlsson; B. Karlsson; B. o. Tohansson
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The solar selective properties of thin titanium nitride films have been studied. High quality TiN-films were made on fused silica and glass substrates by reactive sputtering of titanium in a nitrogen atmosphere. The resulting film thicknesses ranged from 5 - 120 nm. The reflectance and transmittance measurements confirm the high solar and visible transmission previously calculated from optical constants. The infrared reflection is lower than calculated, but sufficiently high to make TiN a new competitor for selective transmission applications. Three optical parameters were determined and used to obtain the optical constants as well as the film thickness. The refractive index increases with decreasing thickness. The extinction coefficient is almost constant above the thickness of 12 nm, but strongly reduced for films thinner than this.

Paper Details

Date Published: 28 November 1983
PDF: 7 pages
Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); doi: 10.1117/12.935541
Show Author Affiliations
E. Valkonen, Uppsala University (Sweden)
T. Karlsson, Uppsala University (Sweden)
B. Karlsson, Swedish State Power Board (Sweden)
B. o. Tohansson, University of Linkoping (Sweden)

Published in SPIE Proceedings Vol. 0401:
Thin Film Technologies I
J. Roland Jacobsson, Editor(s)

© SPIE. Terms of Use
Back to Top