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Proceedings Paper

Control Of The Optical Properties Of Transparent Conducting Films Prepared By Reactive Magnetron Shuttering
Author(s): Martin I. Ridge; Ronald P. Howson; Inarid Ten Have
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Paper Abstract

Visibly transparent highly conducting indium oxide has been prepared on flexible plastic sheet in a continuous roll-to-roll reactive magnetron sputtering apparatus.Results are presented which show the sensitive dependence of the optical and electrical properties of the coatings on the deposition conditions. Attention is drawn to the control of gas admittance and maanetron current and the necessary procedures are described.

Paper Details

Date Published: 28 November 1983
PDF: 6 pages
Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); doi: 10.1117/12.935531
Show Author Affiliations
Martin I. Ridge, University of Technology (United Kingdom)
Ronald P. Howson, University of Technology (United Kingdom)
Inarid Ten Have, Twente University (Holland)

Published in SPIE Proceedings Vol. 0401:
Thin Film Technologies I
J. Roland Jacobsson, Editor(s)

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