Share Email Print

Proceedings Paper

High-Rate Sputtering For Optical Purposes
Author(s): Bogdan Zega
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Magnetron Reactive sputtering presents interesting possibilities for the deposition of optical coatings. Many oxydes and nitrides have been obtained in this way from metallic targets, in while the synthesis of other compounds (fluorides, sulfides) is still problematic. Starting with relatively rough optical applications, as: colored window-glass coatings and indiumtin oxide layers for IR-reflectors, the high-rate magnetron sputtering becomes available for precision optical (interferential) coatings, owing to the progress made in the mastering of the reactive sputtering machinism.

Paper Details

Date Published: 28 November 1983
PDF: 5 pages
Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); doi: 10.1117/12.935529
Show Author Affiliations
Bogdan Zega, Battelle-Geneva Research Centres (Switzerland)

Published in SPIE Proceedings Vol. 0401:
Thin Film Technologies I
J. Roland Jacobsson, Editor(s)

© SPIE. Terms of Use
Back to Top