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Proceedings Paper

Surface Roughness Assessment Of Ultrasmooth Laser Mirrors And Substrates
Author(s): K. H. Guenther; P. G. Wierer
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Paper Abstract

The surface roughness of ultrasmooth laser mirror coatings and substrates can be assessed in various ways: mechanically, optically and electron-optically. In this paper, a selection of useful methods like stylus measurements, optical heterodyne profilometry, light scattering measurements and electron mirror interference microscopy is presented. Results obtained with these methods at various laboratories from our inhouse superpolished optical flats are given. Some problems of comparing the results from the different methods are addressed and aspects of the practical utility of the methods discussed.

Paper Details

Date Published: 28 November 1983
PDF: 14 pages
Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); doi: 10.1117/12.935527
Show Author Affiliations
K. H. Guenther, Balzers AG (Liechtenstein)
P. G. Wierer, Balzers AG (Liechtenstein)

Published in SPIE Proceedings Vol. 0401:
Thin Film Technologies I
J. Roland Jacobsson, Editor(s)

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