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Proceedings Paper

Preparation Of Planar Optical SiO2-TiO2 And LiNbO3 Waveguides With A Dip Coating Method And An Embossing Technique For Fabricating Grating Couplers And Channel Waveguides
Author(s): K. Tiefenthaler; V. Briguet; E. Buser; M. Horisberger; W. Lukosz
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Paper Abstract

Planar monomode and multimode Si02-Ti02 waveguides were prepared with a dip coating method from Liquicoat solutions supplied by E. MERCK. By varying the Si02:Ti02 mixture ratio the value of the refractive index nF of the waveguiding films on Pyrex glass substrates can be chosen to lie between nF-1.6 and nF =1.36 First results on the preparation of LiNb03 waveguides are also presented. Thicknesses, refractive indices and losses of the waveguides were determined at the blue-green Ar laser wavelengths and at the He-Ne laser wavelengths λ=632.8 nm and λ=1.153 μm. With an embossing technique we fabricated surface relief gratings on Si02-Ti02 wave-guides. We used them successfully as input grating couplers. We propose to use this emboss-ing technique to fabricate channel waveguides and other integrated optical components in inorganic hard waveguiding materials such as Si02-Ti02.

Paper Details

Date Published: 28 November 1983
PDF: 9 pages
Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); doi: 10.1117/12.935515
Show Author Affiliations
K. Tiefenthaler, Swiss Federal Institute of Technology (Switzerland)
V. Briguet, Swiss Federal Institute of Technology (Switzerland)
E. Buser, Swiss Federal Institute of Technology (Switzerland)
M. Horisberger, Swiss Federal Institute of Technology (Switzerland)
W. Lukosz, Swiss Federal Institute of Technology (Switzerland)


Published in SPIE Proceedings Vol. 0401:
Thin Film Technologies I
J. Roland Jacobsson, Editor(s)

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