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Proceedings Paper

Mechanical Stresses On Evaporated Chromium Films
Author(s): R. Berger; H. K. Pulker
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Paper Abstract

Measurements were carried out concerning the intrinsic tensile stress of chromium films evaporated onto bare and precoated glass substrates. Additionally the structure and microstructure of the films were investigated. Using these results together with the elastic data of chromium films a quantitative interpretation based on a grain boundary model could be performed.

Paper Details

Date Published: 28 November 1983
PDF: 5 pages
Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); doi: 10.1117/12.935504
Show Author Affiliations
R. Berger, University of Innsbruck (Austria)
H. K. Pulker, University of Innsbruck (Austria)


Published in SPIE Proceedings Vol. 0401:
Thin Film Technologies I
J. Roland Jacobsson, Editor(s)

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