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Proceedings Paper

Refractive Index Measurement During The Deposition Of Dielectric Coatings
Author(s): Andreas Englisch; Johannes Ebert
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Paper Abstract

Refractive indices and index profiles of dielectric coatings have been measured during their deposition. The measurements can be applied in the case of single layers as well as complex layer systems with arbitrary layer thicknesses. The refractive index of homogeneous layers is investigated using transmission measurements of monochromatic light, whereas inhomogeneous layer profiles are measured at different wavelengths.With an accurately determined index, the production of special dielectric multilayer stacks as steep edge filters or antireflection coatings with low residual reflection can be realized. Thus it is possible to reach the theoretical steepness by monitoring the actual refractive index and correcting the layer thickness accordingly. Considering inhomogeneities the performance of antireflection coatings can be improved.

Paper Details

Date Published: 28 November 1983
PDF: 8 pages
Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); doi: 10.1117/12.935499
Show Author Affiliations
Andreas Englisch, Universitat Hannover (Federal Republic of Germany)
Johannes Ebert, Universitat Hannover (Federal Republic of Germany)


Published in SPIE Proceedings Vol. 0401:
Thin Film Technologies I
J. Roland Jacobsson, Editor(s)

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