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Proceedings Paper

Precision Measurement Of Surface Form By Laser Autocollimation
Author(s): A. E. Ennos; M. S. Virdee
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Paper Abstract

The profile of an optical surface can be measured to nanometre accuracy by integrating slope values obtained by laser autocollimation. An instrument based on this principle for measuring X-ray microscope mirror surfaces of conicoid shape has been developed, and its application to monitoring precision lapping is described. A second system for the measurement of optical flats is also under development.

Paper Details

Date Published: 26 October 1983
PDF: 6 pages
Proc. SPIE 0398, Industrial Applications of Laser Technology, (26 October 1983); doi: 10.1117/12.935384
Show Author Affiliations
A. E. Ennos, National Physical Laboratory (Great Britain)
M. S. Virdee, National Physical Laboratory (Great Britain)

Published in SPIE Proceedings Vol. 0398:
Industrial Applications of Laser Technology
William F. Fagan, Editor(s)

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