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Proceedings Paper

Surface Topography Restitution From Electron Micrographs Of Extended Surface Replicas In Situ
Author(s): A. Llebaria; M. Rasigni; G. Rasigni; J. P. Paircari; F. Varnier
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Paper Abstract

An original image processing procedure that reconstructs the surface topography of a heavy metal-shadowed replica from a digitized micrograph is presented. The theory of this method is established and its limits are discussed. The usefulness and validity of the median filtering algorithm used in the data reduction are shown. The entire procedure has been implemented in a small 16 bit minicomputer. The method has been used to study the rough surfaces of copper, silver, magnesium and gold deposits by autocovariance functions of surface profiles. The results show that good reconstructions of extended surface replicas are obtained. Several new methods of improving the reconstruction process have been tested and are briefly presented. Under good experimental conditions the lateral resolution was 50 A for an overall field size of 40.000 A. This shows that our method may have important applications besides the study of alterable metallic surfaces.

Paper Details

Date Published: 26 October 1983
PDF: 9 pages
Proc. SPIE 0397, Applications of Digital Image Processing V, (26 October 1983); doi: 10.1117/12.935320
Show Author Affiliations
A. Llebaria, Laboratoire d'Astronomie Spatiale du Centre National de la Recherche Scientifique (France)
M. Rasigni, Universite Aix-Marseille III (France)
G. Rasigni, Universite Aix-Marseille III (France)
J. P. Paircari, Universite Aix-Marseille III (France)
F. Varnier, Universite Aix-Marseille III (France)

Published in SPIE Proceedings Vol. 0397:
Applications of Digital Image Processing V
Andre J. Oosterlinck; Andrew G. Tescher, Editor(s)

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