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Proceedings Paper

Laser Pattern Generation System
Author(s): Hideo Tsuiki; Seiichi Ito
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Paper Abstract

A raster scanning laser pattern generation system for imaging printed circuit board (PCB) master artwork has been developed. The system can generate a master artwork image up to 600 mm (fast scanning direction) by 650 mm (slow scanning direction) in size at a 370 cm2/min. imaging speed, guaranteeing ±20 pm feature location accuracy in the whole imaging area. Introduction of this system to the master artwork imaging process is expected to result in a dramatic effect realizing an imaging time reduction by a factor of ten on the average and by a factor of more than thirty on large scale and high circuit density master artwork, even when time for data handling is taken into account.

Paper Details

Date Published: 26 October 1983
PDF: 9 pages
Proc. SPIE 0396, Advances in Laser Scanning and Recording, (26 October 1983); doi: 10.1117/12.935263
Show Author Affiliations
Hideo Tsuiki, NEC Corporation (Japan)
Seiichi Ito, NEC Corporation (Japan)


Published in SPIE Proceedings Vol. 0396:
Advances in Laser Scanning and Recording
Leo Beiser, Editor(s)

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