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Proceedings Paper

Rotating Scan Interferometer
Author(s): Peter Langenbeck
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Paper Abstract

Centration, tilt and offset of spheric and of aspheric surfaces are detected by an interferometer with a zonal rotary scan by means of a precise air bearing spindle thus providing the topography of the sample.

Paper Details

Date Published: 26 October 1983
PDF: 3 pages
Proc. SPIE 0396, Advances in Laser Scanning and Recording, (26 October 1983); doi: 10.1117/12.935258
Show Author Affiliations
Peter Langenbeck, Protop GmbH (West Germany)

Published in SPIE Proceedings Vol. 0396:
Advances in Laser Scanning and Recording
Leo Beiser, Editor(s)

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