Share Email Print
cover

Proceedings Paper

Rotating Scan Interferometer
Author(s): Peter Langenbeck
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Centration, tilt and offset of spheric and of aspheric surfaces are detected by an interferometer with a zonal rotary scan by means of a precise air bearing spindle thus providing the topography of the sample.

Paper Details

Date Published: 26 October 1983
PDF: 3 pages
Proc. SPIE 0396, Advances in Laser Scanning and Recording, (26 October 1983); doi: 10.1117/12.935258
Show Author Affiliations
Peter Langenbeck, Protop GmbH (West Germany)


Published in SPIE Proceedings Vol. 0396:
Advances in Laser Scanning and Recording
Leo Beiser, Editor(s)

© SPIE. Terms of Use
Back to Top